Tipărire

D. Savastru, D. Tenciu, C. P. Lungu, M. Osiac, C. Viespe, C. Grigorescu, R. Iordanescu, I. D. Feraru, V. Ionescu, O. Monnereau, L. Tortet, R. Notonier, PZT films prepared by TVA and PLD from PbO(2):TiO(2):ZrO(2) (1:1:1) nanoceramic targets, Dig. J. Nanomater Bios. Digest Journal of Nanomaterials and Biostructures, 6/1 (2011) 2007-2012.

 

Title: PZT films prepared by TVA and PLD from PbO(2):TiO(2):ZrO(2) (1:1:1) nanoceramic targets

Abstract: Lead zirconate titanate (PZT) thin films on Si single crystal were prepared by two techniques: a) thermionic vacuum arc (TVA) and b) pulsed laser deposition (PLD), using ceramic targets made of PbO(2), ZrO(2) and TiO(2) nanopowders. Structural characterisation of the samples by XRD, EDS and micro-Raman spectroscopy reveals combinations of PZT and its constituent oxides resulting from either experiment. Morphology studies carried out by SEM and AFM remark a smoother surface for the PLD films than for the TVA ones. A comparison between the ablated and the raw zones of the PLD target leads to the conclusion that the laser-ceramic interaction eases the PZT synthesis.

Key words: PZT; thermmionic vacuum arc deposition; Pulsed laser deposition; Raman spectroscopy; Thin films; Structural characterisation