A. Vladescu, M. Balaceanu, V. Braic, C. Cotrut, A. Kiss, M. Braic, Effect of pulsed ion bombardment on early deposition stage of Ti based biocompatible coatings, Plasma Process Polym. 4 (2007) S406-S410

 

Title: Effect of pulsed ion bombardment on early deposition stage of Ti based biocompatible coatings

Abstract: TiN and TiAlN coatings were deposited on CoCr alloy, 316L stainless steel, and Si substrates by cathodic arc method. Various ion bombardment conditions were obtained by different DC and pulsed bias voltages applied on the substrates. A comparative analysis of the coating characteristics for different substrate biasing conditions was performed.

Key words: cathodic arc deposition; DC and pulsed bias; mechanical characteristics; TiN and TiAlN; wear-corrosion resistance